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Our lab is located in Spencer Laboratory, Room 318.  Our major equipment includes:


Sputtering System

A PVD Products computer controlled sputtering system is in place.  The system features 4 RF/DC magnetron sputter guns, a RF/DC biasable and rotatable substrate stage that can be heated up to 800°C, and a turbopumped loadlock.  Two gas inlets are available for reactive sputtering (typically of oxides) with both upstream and downstream pressure control.  Base pressure is < 2·10-8 Torr.

High temperature furnace

We have a custom-built MHI furnace capable of continuous operation up to 1600°C.  The sample chamber is a 4.5-inch diameter tube that can be evacuated or filled with nearly any gas.  Feedthroughs are available for in-situ 4-probe electrical measurement.

Impedance Spectrometer

In addition to DC electrical characterization equipment, we have a Novocontrol Alpha-A impedance analyzer with ZG-4 test interface for 2-, 3-, and 4-wire measurements.  The system measures from 30 µHz up to 3 MHz with or without DC bias.  Samples can have impedance anywhere from 1 mΩ up to 100 TΩ.

We have written our own LabVIEW software to control the Novocontrol, providing automated calibration routines, giving access to advanced hardware settings, and measuring sweeps of frequency, DC bias, AC signal amplitude, and time.  We are happy to share it; please email us and we will send you the source code.

Characterization furnaces

We have two Across International tube furnaces capable of operation up to 1200°C.  The sample chamber is a 2-inch inner diameter tube that can be evacuated or filled with nearly any gas.  Feedthroughs are available for thermocouples, an oxygen sensor, and in-situ 4-probe electrical measurement.  In addition, we have a box furnace that can operate in air up to 800 °C with electrical feedthroughs.

Ceramic Fabrication

We have a suite of equipment for traditional ceramic powder processing, including facilities for weighing, blending, milling, calcining, and uniaxial pressing.  In addition, we perform solution based and sol-gel fabrication of ceramics.

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